SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
冷发射电子束掺杂磷
李秀琼; 王培大; 马祥彬; 王纯
1990
Source Publication半导体学报
Volume11Issue:12Pages:942
metadata_83中科院微电子中心;中科院半导体所
Subject Area半导体材料
Funding Organization国家自然科学基金
Indexed ByCSCD
Language中文
CSCD IDCSCD:112274
Date Available2010-11-23
Citation statistics
Cited Times:2[CSCD]   [CSCD Record]
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/20503
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
李秀琼,王培大,马祥彬,等. 冷发射电子束掺杂磷[J]. 半导体学报,1990,11(12):942.
APA 李秀琼,王培大,马祥彬,&王纯.(1990).冷发射电子束掺杂磷.半导体学报,11(12),942.
MLA 李秀琼,et al."冷发射电子束掺杂磷".半导体学报 11.12(1990):942.
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