SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
Co与Si和SiO_2在快速热退火中的反应
陈维德; 崔玉德; 许振嘉; 陶江
1990
Source Publication半导体学报
Volume11Issue:11Pages:859
metadata_83中科院半导体所;北京大学
Subject Area半导体材料
Indexed ByCSCD
Language中文
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/20493
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
陈维德,崔玉德,许振嘉,等. Co与Si和SiO_2在快速热退火中的反应[J]. 半导体学报,1990,11(11):859.
APA 陈维德,崔玉德,许振嘉,&陶江.(1990).Co与Si和SiO_2在快速热退火中的反应.半导体学报,11(11),859.
MLA 陈维德,et al."Co与Si和SiO_2在快速热退火中的反应".半导体学报 11.11(1990):859.
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