SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
利用能量过滤成像技术对注氮SOI的研究
段晓峰; 都安彦; 褚一鸣
1990
Source Publication半导体学报
Volume11Issue:9Pages:688
metadata_83中科院北京电子显微镜实验室;中科院半导体所
Subject Area半导体材料
Indexed ByCSCD
Language中文
CSCD IDCSCD:112303
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/20479
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
段晓峰,都安彦,褚一鸣. 利用能量过滤成像技术对注氮SOI的研究[J]. 半导体学报,1990,11(9):688.
APA 段晓峰,都安彦,&褚一鸣.(1990).利用能量过滤成像技术对注氮SOI的研究.半导体学报,11(9),688.
MLA 段晓峰,et al."利用能量过滤成像技术对注氮SOI的研究".半导体学报 11.9(1990):688.
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