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硼磷硅玻璃在俄歇电子谱分析中的电子束和离子束辐照效应
陈维德; Bender H
1991
Source Publication半导体学报
Volume12Issue:5Pages:284
metadata_83中科院半导体所;比利时大学
Subject Area半导体物理
Indexed ByCSCD
Language中文
CSCD IDCSCD:140107
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/20341
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
陈维德,Bender H. 硼磷硅玻璃在俄歇电子谱分析中的电子束和离子束辐照效应[J]. 半导体学报,1991,12(5):284.
APA 陈维德,&Bender H.(1991).硼磷硅玻璃在俄歇电子谱分析中的电子束和离子束辐照效应.半导体学报,12(5),284.
MLA 陈维德,et al."硼磷硅玻璃在俄歇电子谱分析中的电子束和离子束辐照效应".半导体学报 12.5(1991):284.
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