SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
钛在硅浅结互连中引进深能级的研究
李秀琼; 卢励吾; 陈维德
1993
Source Publication半导体学报
Volume14Issue:2Pages:83
metadata_83中科院微电子中心;中科院半导体所
Subject Area半导体材料
Funding Organization国家自然科学基金
Indexed ByCSCD
Language中文
CSCD IDCSCD:198970
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/20151
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
李秀琼,卢励吾,陈维德. 钛在硅浅结互连中引进深能级的研究[J]. 半导体学报,1993,14(2):83.
APA 李秀琼,卢励吾,&陈维德.(1993).钛在硅浅结互连中引进深能级的研究.半导体学报,14(2),83.
MLA 李秀琼,et al."钛在硅浅结互连中引进深能级的研究".半导体学报 14.2(1993):83.
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