Co-Si多层膜的透射电镜研究

SEMI OpenIR > 中国科学院半导体研究所（2009年前）

	Co-Si多层膜的透射电镜研究
	顾诠; 何杰; 钱家俊; 陈维德; 许振嘉
	1993
Source Publication	半导体学报
Volume	14 Issue:12 Pages:738
metadata_83	中科院半导体所
Subject Area	半导体材料
Funding Organization	国家自然科学基金
Indexed By	CSCD
Language	中文
CSCD ID	CSCD:199088
Date Available	2010-11-23
Citation statistics
Document Type	期刊论文
Identifier	http://ir.semi.ac.cn/handle/172111/20095
Collection	中国科学院半导体研究所（2009年前）
Recommended Citation GB/T 7714	顾诠,何杰,钱家俊,等. Co-Si多层膜的透射电镜研究[J]. 半导体学报,1993,14(12):738.
APA	顾诠,何杰,钱家俊,陈维德,&许振嘉.(1993).Co-Si多层膜的透射电镜研究.半导体学报,14(12),738.
MLA	顾诠,et al."Co-Si多层膜的透射电镜研究".半导体学报 14.12(1993):738.

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