SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
Co-Si多层膜的透射电镜研究
顾诠; 何杰; 钱家俊; 陈维德; 许振嘉
1993
Source Publication半导体学报
Volume14Issue:12Pages:738
metadata_83中科院半导体所
Subject Area半导体材料
Funding Organization国家自然科学基金
Indexed ByCSCD
Language中文
CSCD IDCSCD:199088
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/20095
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
顾诠,何杰,钱家俊,等. Co-Si多层膜的透射电镜研究[J]. 半导体学报,1993,14(12):738.
APA 顾诠,何杰,钱家俊,陈维德,&许振嘉.(1993).Co-Si多层膜的透射电镜研究.半导体学报,14(12),738.
MLA 顾诠,et al."Co-Si多层膜的透射电镜研究".半导体学报 14.12(1993):738.
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