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一种新的反应机制-轻稀土金属薄膜与Si衬底的反应机理研究
何杰; 许振熹
1993
Source Publication物理学报
Volume42Issue:10Pages:1617
metadata_83中科院半导体所
Subject Area半导体化学
Funding Organization国家自然科学基金,其它基金
Indexed ByCSCD
Language中文
CSCD IDCSCD:217532
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/20059
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
何杰,许振熹. 一种新的反应机制-轻稀土金属薄膜与Si衬底的反应机理研究[J]. 物理学报,1993,42(10):1617.
APA 何杰,&许振熹.(1993).一种新的反应机制-轻稀土金属薄膜与Si衬底的反应机理研究.物理学报,42(10),1617.
MLA 何杰,et al."一种新的反应机制-轻稀土金属薄膜与Si衬底的反应机理研究".物理学报 42.10(1993):1617.
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