SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
纳米硅薄膜界面结构的微观特征
何宇亮; 褚一鸣; 王中怀; 刘湘娜; 白春礼
1994
Source Publication半导体学报
Volume15Issue:1Pages:71
metadata_83北京航空航天大学非晶态物理研究室;中科院半导体所;中科院化学所;南京大学物理系
Subject Area半导体材料
Funding Organization国家自然科学基金
Indexed ByCSCD
Language中文
CSCD IDCSCD:230052
Date Available2010-11-23
Citation statistics
Cited Times:6[CSCD]   [CSCD Record]
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/20027
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
何宇亮,褚一鸣,王中怀,等. 纳米硅薄膜界面结构的微观特征[J]. 半导体学报,1994,15(1):71.
APA 何宇亮,褚一鸣,王中怀,刘湘娜,&白春礼.(1994).纳米硅薄膜界面结构的微观特征.半导体学报,15(1),71.
MLA 何宇亮,et al."纳米硅薄膜界面结构的微观特征".半导体学报 15.1(1994):71.
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