SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
多孔化PECVD硅薄膜的室温光致发光
王燕; 廖显伯; 潘广勤; 孔光临
1994
Source Publication半导体学报
Volume15Issue:8Pages:569
metadata_83中科院半导体所
Subject Area半导体材料
Indexed ByCSCD
Language中文
CSCD IDCSCD:230084
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/20015
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
王燕,廖显伯,潘广勤,等. 多孔化PECVD硅薄膜的室温光致发光[J]. 半导体学报,1994,15(8):569.
APA 王燕,廖显伯,潘广勤,&孔光临.(1994).多孔化PECVD硅薄膜的室温光致发光.半导体学报,15(8),569.
MLA 王燕,et al."多孔化PECVD硅薄膜的室温光致发光".半导体学报 15.8(1994):569.
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