SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
电子束曝光机自动套准系统的研究
王向东; 杜秉初; 葛璜
1995
Source Publication电子学报
Volume23Issue:8Pages:92
metadata_83清华大学电子工程系;中科院半导体所
Subject Area微电子学
Funding Organization国家863计划
Indexed ByCSCD
Language中文
CSCD IDCSCD:266724
Date Available2010-11-23
Citation statistics
Cited Times:1[CSCD]   [CSCD Record]
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/19781
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
王向东,杜秉初,葛璜. 电子束曝光机自动套准系统的研究[J]. 电子学报,1995,23(8):92.
APA 王向东,杜秉初,&葛璜.(1995).电子束曝光机自动套准系统的研究.电子学报,23(8),92.
MLA 王向东,et al."电子束曝光机自动套准系统的研究".电子学报 23.8(1995):92.
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