SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
用于GaN生长的蓝宝石衬底化学抛光研究
王晓晖; 刘祥林; 汪度; 陆大成
1997
Source Publication半导体学报
Volume18Issue:11Pages:867
metadata_83中科院半导体所
Subject Area半导体材料
Indexed ByCSCD
Language中文
CSCD IDCSCD:358514
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/19499
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
王晓晖,刘祥林,汪度,等. 用于GaN生长的蓝宝石衬底化学抛光研究[J]. 半导体学报,1997,18(11):867.
APA 王晓晖,刘祥林,汪度,&陆大成.(1997).用于GaN生长的蓝宝石衬底化学抛光研究.半导体学报,18(11),867.
MLA 王晓晖,et al."用于GaN生长的蓝宝石衬底化学抛光研究".半导体学报 18.11(1997):867.
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