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用于GaN生长的蓝宝石衬底化学抛光研究 | |
王晓晖; 刘祥林; 汪度; 陆大成 | |
1997 | |
Source Publication | 半导体学报
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Volume | 18Issue:11Pages:867 |
metadata_83 | 中科院半导体所 |
Subject Area | 半导体材料 |
Indexed By | CSCD |
Language | 中文 |
CSCD ID | CSCD:358514 |
Date Available | 2010-11-23 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.semi.ac.cn/handle/172111/19499 |
Collection | 中国科学院半导体研究所(2009年前) |
Recommended Citation GB/T 7714 | 王晓晖,刘祥林,汪度,等. 用于GaN生长的蓝宝石衬底化学抛光研究[J]. 半导体学报,1997,18(11):867. |
APA | 王晓晖,刘祥林,汪度,&陆大成.(1997).用于GaN生长的蓝宝石衬底化学抛光研究.半导体学报,18(11),867. |
MLA | 王晓晖,et al."用于GaN生长的蓝宝石衬底化学抛光研究".半导体学报 18.11(1997):867. |
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