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MOVPE生长Ga(CH3)3—AsH3—H2体系中砷的形态转化及砷的治理
闻瑞梅; 梁骏吾
1997
Source Publication电子学报
Volume25Issue:2Pages:76
metadata_83中科院半导体所
Subject Area半导体材料
Indexed ByCSCD
Language中文
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/19391
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
闻瑞梅,梁骏吾. MOVPE生长Ga(CH3)3—AsH3—H2体系中砷的形态转化及砷的治理[J]. 电子学报,1997,25(2):76.
APA 闻瑞梅,&梁骏吾.(1997).MOVPE生长Ga(CH3)3—AsH3—H2体系中砷的形态转化及砷的治理.电子学报,25(2),76.
MLA 闻瑞梅,et al."MOVPE生长Ga(CH3)3—AsH3—H2体系中砷的形态转化及砷的治理".电子学报 25.2(1997):76.
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