SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
248nm KrF准分子激光零级抑制石英相位掩模器的研制
陈根祥; 程美乔; 葛璜; 简水生; 王圩
1997
Source Publication中国激光
Volume24Issue:7Pages:623
metadata_83北方交通大学光波技术所;中科院半导体所
Subject Area半导体器件
Funding Organization国家教委博士点基金,国家自然科学基金,国家863计划
Indexed ByCSCD
Language中文
CSCD IDCSCD:408007
Date Available2010-11-23
Citation statistics
Cited Times:4[CSCD]   [CSCD Record]
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/19309
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
陈根祥,程美乔,葛璜,等. 248nm KrF准分子激光零级抑制石英相位掩模器的研制[J]. 中国激光,1997,24(7):623.
APA 陈根祥,程美乔,葛璜,简水生,&王圩.(1997).248nm KrF准分子激光零级抑制石英相位掩模器的研制.中国激光,24(7),623.
MLA 陈根祥,et al."248nm KrF准分子激光零级抑制石英相位掩模器的研制".中国激光 24.7(1997):623.
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