SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
Ti-AlN快速退火的界面
王佑祥; 陈新; 陶琨
1996
Source Publication清华大学学报. 自然科学版
Volume36Issue:增刊Pages:52
metadata_83中科院半导体所;清华大学材料科学与工程系
Subject Area半导体材料
Funding Organization国家自然科学基金
Indexed ByCSCD
Language中文
CSCD IDCSCD:520980
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/19017
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
王佑祥,陈新,陶琨. Ti-AlN快速退火的界面[J]. 清华大学学报. 自然科学版,1996,36(增刊):52.
APA 王佑祥,陈新,&陶琨.(1996).Ti-AlN快速退火的界面.清华大学学报. 自然科学版,36(增刊),52.
MLA 王佑祥,et al."Ti-AlN快速退火的界面".清华大学学报. 自然科学版 36.增刊(1996):52.
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