SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
基于神经网络方法的半导体生产工艺优化
王向东; 陈咏梅; 王守觉; 石林初
2000
Source Publication半导体学报
Volume21Issue:2Pages:192
metadata_83中科院半导体所;华晶电子集团公司双极设计所
Subject Area人工智能
Indexed ByCSCD
Language中文
CSCD IDCSCD:532678
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/18823
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
王向东,陈咏梅,王守觉,等. 基于神经网络方法的半导体生产工艺优化[J]. 半导体学报,2000,21(2):192.
APA 王向东,陈咏梅,王守觉,&石林初.(2000).基于神经网络方法的半导体生产工艺优化.半导体学报,21(2),192.
MLA 王向东,et al."基于神经网络方法的半导体生产工艺优化".半导体学报 21.2(2000):192.
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