SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
用于共振腔光电探测器的Si基Bragg反射器
李成; 杨沁清; 朱家廉; 王红杰; 成步文; 余金中; 王启明; 王鲁峰; 彭晔
2000
Source Publication半导体学报
Volume21Issue:5Pages:483
AbstractSi基共振腔型光电探测器的关键工艺是隐埋Bragg反射器镜面的制备。用PECVD方法在Si衬底上制备了SiO_xN_y/Si Bragg反射器,研究了Bragg反射器的反射谱和退火行为。
metadata_83中科院半导体所;中科院半导体所国家光电子工艺中心
Subject Area光电子学
Funding Organization国家自然科学基金,国家863计划,国家自然科学基金
Indexed ByCSCD
Language中文
CSCD IDCSCD:532732
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/18795
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
李成,杨沁清,朱家廉,等. 用于共振腔光电探测器的Si基Bragg反射器[J]. 半导体学报,2000,21(5):483.
APA 李成.,杨沁清.,朱家廉.,王红杰.,成步文.,...&彭晔.(2000).用于共振腔光电探测器的Si基Bragg反射器.半导体学报,21(5),483.
MLA 李成,et al."用于共振腔光电探测器的Si基Bragg反射器".半导体学报 21.5(2000):483.
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