SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
一种微机械光开关的分析和设计(英文)
贾玉斌; 陈良惠; 李玉璋
2001
Source Publication半导体学报
Volume22Issue:7Pages:837
Abstract对悬臂梁微机械光开关的机电特性进行了理论分析。利用机械和电学特性,导出了悬臂梁的弯曲量和所加的电压的解析关系,并给出阈值电压的计算公式。指出外加电压与梁的宽度无关,与梁的长度的平方成反比。悬臂梁尖端的弯曲量不能超出相邻电极间距的1/3。这些结论是悬臂梁微机械光开关设计和研制的直接依据。
metadata_83中科院半导体所
Subject Area光电子学
Indexed ByCSCD
Language中文
CSCD IDCSCD:533032
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/18663
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
贾玉斌,陈良惠,李玉璋. 一种微机械光开关的分析和设计(英文)[J]. 半导体学报,2001,22(7):837.
APA 贾玉斌,陈良惠,&李玉璋.(2001).一种微机械光开关的分析和设计(英文).半导体学报,22(7),837.
MLA 贾玉斌,et al."一种微机械光开关的分析和设计(英文)".半导体学报 22.7(2001):837.
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