SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
硼扩散引起薄SiO_2栅介质的性能退化
高文钰; 刘忠立; 梁秀琴; 于芳; 聂纪平; 李国花
1999
Source Publication电子学报
Volume27Issue:8Pages:144
metadata_83中科院半导体所
Subject Area微电子学
Funding Organization国家自然科学基金
Indexed ByCSCD
Language中文
CSCD IDCSCD:579609
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/18569
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
高文钰,刘忠立,梁秀琴,等. 硼扩散引起薄SiO_2栅介质的性能退化[J]. 电子学报,1999,27(8):144.
APA 高文钰,刘忠立,梁秀琴,于芳,聂纪平,&李国花.(1999).硼扩散引起薄SiO_2栅介质的性能退化.电子学报,27(8),144.
MLA 高文钰,et al."硼扩散引起薄SiO_2栅介质的性能退化".电子学报 27.8(1999):144.
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