SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
微光电子集成灵巧象素器件
陈弘达; 曾庆明; 李献杰; 陈志标; 杜云; 周革; 华锋; 黄永箴; 吴荣汉
2000
Source Publication光电子·激光
Volume11Issue:2Pages:111
Abstract采用MBE生长出大周期GaAs/AlGaAs多量子阱外延材料,研制了适用于倒装焊结构的自电光效应器件列阵,并与Si CMOS电路通过倒装焊工艺集成为微光电子集成灵巧象素器件。通过对光电特性测试表明,器件具有良好的光探测和光调制性能。
metadata_83中科院半导体所;电子部河北半导体所;天津大学现代光学仪器研究所
Subject Area光电子学
Funding Organization国家自然科学基金,国家863计划
Indexed ByCSCD
Language中文
CSCD IDCSCD:599684
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/18497
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
陈弘达,曾庆明,李献杰,等. 微光电子集成灵巧象素器件[J]. 光电子·激光,2000,11(2):111.
APA 陈弘达.,曾庆明.,李献杰.,陈志标.,杜云.,...&吴荣汉.(2000).微光电子集成灵巧象素器件.光电子·激光,11(2),111.
MLA 陈弘达,et al."微光电子集成灵巧象素器件".光电子·激光 11.2(2000):111.
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