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计算机程序控制电晕极化系统
石志文; 应志春; 陈廷杰; 应冉沂; 吴荣汉
2000
Source Publication功能材料与器件学报
Volume6Issue:4Pages:413
metadata_83中科院半导体所;地质矿产部岩矿测试技术所;北京汇理信息技术公司
Subject Area微电子学
Indexed ByCSCD
Language中文
CSCD IDCSCD:608070
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/18423
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
石志文,应志春,陈廷杰,等. 计算机程序控制电晕极化系统[J]. 功能材料与器件学报,2000,6(4):413.
APA 石志文,应志春,陈廷杰,应冉沂,&吴荣汉.(2000).计算机程序控制电晕极化系统.功能材料与器件学报,6(4),413.
MLA 石志文,et al."计算机程序控制电晕极化系统".功能材料与器件学报 6.4(2000):413.
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