SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
3μm GaInNAs/GasAs Quantum Well Resonant Cavity Enhanced Photodetector
Zhang Ruikang; Zhong Yuan; Xu Yingqiang; Zhang Wei; Du Yun; Huang Yongqing; Ren Xiaomin; Pan Zhang; Lin Yaowang
2002
Source Publication光子学报
Volume31Issue:3Pages:303-307
AbstractA 1.3μm GaInNAs resonant cavity enhanced (RCE) photodetector (PD) has been grown by molecular beam epitaxy (MBE) monolithically on (100) GaAs substrate using a home-made ion-removed dc-plasma cell as nitrogen source. A transfer matrix method was used to optimize the device structure. The absorption region is composed of three GaInNAs quantum wells separated by GaAs layers. Devices were isolated by etching 130μm-diameter mesas and filling polyamide into grooves. The maximal quantum efficiency of the device is about 12% at 1.293μm. Full width at half maximum (FWHM) is 5.8nm and 3dB bandwidth is 304MHz. Dark current is 2 * 10~(-11) A at zero bias voltage. Further improvement of the performance of the RCE PD can be obtained by optimizing of the structure design and MBE growth conditions.
metadata_83beijing university of post & telecom, p.o. box 66;institute of semiconductors, chinese academy of sciences, p.o. box 912;institute of semiconductors, chinese academy of sciences, p. o. box 912
Subject Area半导体器件
Funding OrganizationThis work was financially supported by Major State Basic Research Program under Grant No. G2 366 3,the National Natural Science Foundation of China under Grant Nos. 6989626 , 69988 5, 69976 7 and 697898 2
Indexed ByCSCD
Language英语
CSCD IDCSCD:989251
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/18025
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
Zhang Ruikang,Zhong Yuan,Xu Yingqiang,et al. 3μm GaInNAs/GasAs Quantum Well Resonant Cavity Enhanced Photodetector[J]. 光子学报,2002,31(3):303-307.
APA Zhang Ruikang.,Zhong Yuan.,Xu Yingqiang.,Zhang Wei.,Du Yun.,...&Lin Yaowang.(2002).3μm GaInNAs/GasAs Quantum Well Resonant Cavity Enhanced Photodetector.光子学报,31(3),303-307.
MLA Zhang Ruikang,et al."3μm GaInNAs/GasAs Quantum Well Resonant Cavity Enhanced Photodetector".光子学报 31.3(2002):303-307.
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