SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
热光Si共振腔型可调谐滤波器
黄昌俊; 左玉华; 成步文; 毛容伟; 李传波; 余金中; 王启明
2003
Source Publication半导体学报
Volume24Issue:12Pages:1312-1317
Abstract报道了利用Si基键合技术和化学机械抛光工艺制作的垂直结构的Fabry-Perot可调谐滤波器,调谐机理为pn结正向注入电流引起的热光效应。调谐范围可达23nm,响应时间约为300 μs,并给出了获得更快响应和更低能耗的热光和电注入可调谐滤波器件结构改进方案。
metadata_83中国科学院半导体研究所
Subject Area光电子学
Funding Organization国家重点基础研究发展规划(973项目)(No. G2 366 3),国家自然科学基金(批准号
Indexed ByCSCD
Language中文
CSCD IDCSCD:1241256
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/17749
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
黄昌俊,左玉华,成步文,等. 热光Si共振腔型可调谐滤波器[J]. 半导体学报,2003,24(12):1312-1317.
APA 黄昌俊.,左玉华.,成步文.,毛容伟.,李传波.,...&王启明.(2003).热光Si共振腔型可调谐滤波器.半导体学报,24(12),1312-1317.
MLA 黄昌俊,et al."热光Si共振腔型可调谐滤波器".半导体学报 24.12(2003):1312-1317.
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