SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
射频CO_2激光陶瓷基板划片机光路设计及分析
侯廉平; 陈陪峰; 王圩
2004
Source Publication光学精密工程
Volume12Issue:1Pages:37-42
Abstract介绍了RF CO_2激光陶瓷基板划片的特点.分析了导光系统的设计原则,着重讨论了圆偏振镜和伽利略离焦望远镜的作用和特点.对导光系统进行了优化和模拟,给出了导光系统的光路图及成像质量图.试验结果和理论相符,系统划片速度可达10 m/min,划缝宽度<0.1 mm,划缝深度>0.3 mm.利用所设计的陶瓷划片机加工的氧化铝陶瓷基片可与国外同类划片机相媲美.
metadata_83中科院半导体所国家光电子工艺中心;华中科技大学激光工程研究院
Subject Area光电子学
Indexed ByCSCD
Language中文
CSCD IDCSCD:1498605
Date Available2010-11-23
Citation statistics
Cited Times:1[CSCD]   [CSCD Record]
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/17555
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
侯廉平,陈陪峰,王圩. 射频CO_2激光陶瓷基板划片机光路设计及分析[J]. 光学精密工程,2004,12(1):37-42.
APA 侯廉平,陈陪峰,&王圩.(2004).射频CO_2激光陶瓷基板划片机光路设计及分析.光学精密工程,12(1),37-42.
MLA 侯廉平,et al."射频CO_2激光陶瓷基板划片机光路设计及分析".光学精密工程 12.1(2004):37-42.
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