SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
Integrated MMI Optical Couplers and Optical Switches in Silicon-on-Insulator Technology
Yu Jinzhong; Wei Hongzhen; Yan Qinfeng; Xia Jinsong; Zhang Xiaofeng
2003
Source Publication中国科学院研究生院学报
Volume20Issue:1Pages:1-6
AbstractIntegrated multimode interference (MMI) coupler based on silicon-on-insulator(SOI) has been becoming a kind of more and more attractive device in optical systems. SiO2thin cladding layers (<1.0 μm) can be usedin SOI waveguide due to the large index step be-tween Si and SiO2, making them compatible with VLSI technology. The design and fabrica-tion of MMI optical couplers and optical switches in SOI technology are presented in thepa-per. We demonstrated the switching time of 2 × 2 MMI-MZI thermo-optical switch is less than 20 μs:
metadata_83institute of semiconductors, chinese academy of sciences
Subject Area光电子学
Funding OrganizationNational Seience Foundation of China,National Ministry of Science and Technology
Indexed ByCSCD
Language英语
CSCD IDCSCD:1577788
Date Available2010-11-23
Citation statistics
Cited Times:1[CSCD]   [CSCD Record]
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/17533
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
Yu Jinzhong,Wei Hongzhen,Yan Qinfeng,et al. Integrated MMI Optical Couplers and Optical Switches in Silicon-on-Insulator Technology[J]. 中国科学院研究生院学报,2003,20(1):1-6.
APA Yu Jinzhong,Wei Hongzhen,Yan Qinfeng,Xia Jinsong,&Zhang Xiaofeng.(2003).Integrated MMI Optical Couplers and Optical Switches in Silicon-on-Insulator Technology.中国科学院研究生院学报,20(1),1-6.
MLA Yu Jinzhong,et al."Integrated MMI Optical Couplers and Optical Switches in Silicon-on-Insulator Technology".中国科学院研究生院学报 20.1(2003):1-6.
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