SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
1.55-μm Si-based MOEMS optical tunable filter
Zuo Yuhua; Huang Changjun; Cheng Buwen; Cai Xiao; Mao Kewei; Li Chuanbo; Luo Liping; Gao Junhua; Bai Yunxia; Jiang Lei; Ma Chaohua; Zhu Jialian; Wang Liangchen; Yu Jinzhong; Wang Qiming
Source PublicationChinese Optics Letters
AbstractA prototype 1.55-μm Si-based micro-opto-electro-mechanical-systems (MOEMS) tunable filter is fabricated, employing surface micromachining technology. Full-width-at-half-maximum (FWHM) of the transmission spectrum is 23 nm. The tuning range is 30 nm under 50-V applied voltage. The device can be readily integrated with resonant cavity enhanced (RCE) detector and vertical cavity surface emitting laser (VCSEL) to fabricate tunable active devices.
metadata_83institute of semiconductors,chinese academy of sciences
Subject Area光电子学
Indexed ByCSCD
Date Available2010-11-23
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Document Type期刊论文
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GB/T 7714
Zuo Yuhua,Huang Changjun,Cheng Buwen,et al. 1.55-μm Si-based MOEMS optical tunable filter[J]. Chinese Optics Letters,2003,1(9):528-531.
APA Zuo Yuhua.,Huang Changjun.,Cheng Buwen.,Cai Xiao.,Mao Kewei.,...&Wang Qiming.(2003).1.55-μm Si-based MOEMS optical tunable filter.Chinese Optics Letters,1(9),528-531.
MLA Zuo Yuhua,et al."1.55-μm Si-based MOEMS optical tunable filter".Chinese Optics Letters 1.9(2003):528-531.
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