SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
射频CO_2激光陶瓷基板划片机光路设计及分析
侯廉平; 陈培峰; 王圩; 朱洪亮
2004
Source Publication激光技术
Volume28Issue:2Pages:137-140
Abstract介绍了RF c0
metadata_83中科院半导体所国家光电子工艺中心;华中科技大学激光技术与工程研究院
Subject Area光电子学
Indexed ByCSCD
Language中文
CSCD IDCSCD:1641422
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/17435
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
侯廉平,陈培峰,王圩,等. 射频CO_2激光陶瓷基板划片机光路设计及分析[J]. 激光技术,2004,28(2):137-140.
APA 侯廉平,陈培峰,王圩,&朱洪亮.(2004).射频CO_2激光陶瓷基板划片机光路设计及分析.激光技术,28(2),137-140.
MLA 侯廉平,et al."射频CO_2激光陶瓷基板划片机光路设计及分析".激光技术 28.2(2004):137-140.
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