Knowledge Management System Of Institute of Semiconductors,CAS
| Fabrication of a SOI Based Channel-shifted Multimode Interference Coupler | |
Wang Zhangtao; Fan Zhongchao ; Chen Shaowu; Yu Jinzhong
| |
| 2004 | |
| Source Publication | 光子学报
 |
| Volume | 33Issue:9Pages:1047-1049 |
| Abstract | A silicon-on-insulator based channel-shifted multimode interference coupler is designed and fabricated. A two dimensional beam propagation method is used to analyze the dependence of coupler′s performances on the width and length of the multimode waveguide. The device fabricated has a power shift ratio of 73 and an excess loss of about 2.2 dB. An enhancement of fabrication accuracies could further improve the coupler performances. |
| metadata_83 | 中科院半导体所 |
| Subject Area | 光电子学 |
| Funding Organization | National Natural science foundation of China,National 863 Project,Key Development Program for Basic Research of China |
| Indexed By | CSCD |
| Language | 英语 |
| CSCD ID | CSCD:1667023 |
| Date Available | 2010-11-23 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.semi.ac.cn/handle/172111/17415 |
| Collection | 中国科学院半导体研究所（2009年前） |
| Recommended Citation GB/T 7714 | Wang Zhangtao,Fan Zhongchao,Chen Shaowu,et al. Fabrication of a SOI Based Channel-shifted Multimode Interference Coupler[J]. 光子学报,2004,33(9):1047-1049. |
| APA | Wang Zhangtao,Fan Zhongchao,Chen Shaowu,&Yu Jinzhong.(2004).Fabrication of a SOI Based Channel-shifted Multimode Interference Coupler.光子学报,33(9),1047-1049. |
| MLA | Wang Zhangtao,et al."Fabrication of a SOI Based Channel-shifted Multimode Interference Coupler".光子学报 33.9(2004):1047-1049. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 4724.pdf（187KB） | 限制开放 | -- | Application Full Text | |||
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