A silicon-on-insulator based channel-shifted multimode interference coupler is designed and fabricated. A two dimensional beam propagation method is used to analyze the dependence of coupler′s performances on the width and length of the multimode waveguide. The device fabricated has a power shift ratio of 73 and an excess loss of about 2.2 dB. An enhancement of fabrication accuracies could further improve the coupler performances.
Wang Zhangtao;Fan Zhongchao;Chen Shaowu;Yu Jinzhong.Fabrication of a SOI Based Channel-shifted Multimode Interference Coupler,光子学报,2004,33(9):1047-1049
