SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
An Efficient MMI SOI Splitter with Multimode Input/Output Waveguides
Fang Qing; He Yuejiao; Xin Hongli; Li Fang; Liu Yuliang
2005
Source Publication半导体学报
Volume26Issue:2Pages:276-280
AbstractA 1×8 multimode interference power splitter with multimode input/output waveguides in SOI material is designed by the beam propagation method and fabricated by the inductive coupled plasma etching technology for use in fiber optics communication systems.The fabricated device exhibits low loss and good coupling uniformity.The excess loss is lower than 0.8dB,and the uniformity is 0.45dB at the wavelength of 1550nm.Moreover,the polarization dependent loss is lower than 0.7dB at 1550nm.The device size is only 2mm×10mm.
metadata_83institute of semiconductors, chinese academy of sciences
Subject Area光电子学
Indexed ByCSCD
Language英语
CSCD IDCSCD:1922390
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/17141
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
Fang Qing,He Yuejiao,Xin Hongli,et al. An Efficient MMI SOI Splitter with Multimode Input/Output Waveguides[J]. 半导体学报,2005,26(2):276-280.
APA Fang Qing,He Yuejiao,Xin Hongli,Li Fang,&Liu Yuliang.(2005).An Efficient MMI SOI Splitter with Multimode Input/Output Waveguides.半导体学报,26(2),276-280.
MLA Fang Qing,et al."An Efficient MMI SOI Splitter with Multimode Input/Output Waveguides".半导体学报 26.2(2005):276-280.
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