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1.55μm MOEMS可调谐光滤波器调谐性能模拟
左玉华; 毛容伟; 王良臣; 余金中; 王启明
2005
Source Publication光子学报
Volume34Issue:4Pages:525-528
Abstract建立了等效单层梁模型和一维集总模型,用经典力学理论和传输矩阵方法模拟了多层材料构成且具有四臂固支梁结构的1.55μm Si基MOEMS(Micro-Opto-Electro-Mechnical-Systems)可调谐滤波器的调谐特性.模拟调谐系数与实验结果吻合较好.
metadata_83中国科学院半导体研究所
Subject Area光电子学
Funding Organization国家重点基础研究发展规划,863高技术发展计划,国家自然科学基金
Indexed ByCSCD
Language中文
CSCD IDCSCD:2026208
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/17045
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
左玉华,毛容伟,王良臣,等. 1.55μm MOEMS可调谐光滤波器调谐性能模拟[J]. 光子学报,2005,34(4):525-528.
APA 左玉华,毛容伟,王良臣,余金中,&王启明.(2005).1.55μm MOEMS可调谐光滤波器调谐性能模拟.光子学报,34(4),525-528.
MLA 左玉华,et al."1.55μm MOEMS可调谐光滤波器调谐性能模拟".光子学报 34.4(2005):525-528.
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