SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
LPCVD Growth of 3C-SiC on Si Mesas and SiO2/Si Substrates for MEMS Applications
SUN Guosheng; WANG Lei; GONG Quancheng; GAO Xin; LIU Xingfang; ZENG Yiping; LI JinminL
2005
Source Publication人工晶体学报
Volume34Issue:6Pages:982-985
AbstractThis paper presents the development of LPCVD growth of 3C-SiC thin films grown on Si mesas and thermally oxidized SiO2 masks over Si with an area of 150 × 100μm^2 and SiO2/Si substrates. The growth has been performed via chemical vapor deposition using SiH4 and C2H4 precursor gases with carrier gas of H2. 3C-SiC films on these substrates were characterized by optical microscopy, X-ray diffraction ( XRD ), X-ray photoelectron spectroscopy ( XPS ), scanning electron microscopy (SEM) and room temperature Hall effect measurements. It is shown that there were no voids at the interface between 3C-SiC and SiO2.
metadata_83institute of semiconductors, chinese academy of sciences
Subject Area半导体材料
Funding OrganizationSpecial Funds for Major State Basic Research Project
Indexed ByCSCD
Language英语
CSCD IDCSCD:2132262
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/16915
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
SUN Guosheng,WANG Lei,GONG Quancheng,et al. LPCVD Growth of 3C-SiC on Si Mesas and SiO2/Si Substrates for MEMS Applications[J]. 人工晶体学报,2005,34(6):982-985.
APA SUN Guosheng.,WANG Lei.,GONG Quancheng.,GAO Xin.,LIU Xingfang.,...&LI JinminL.(2005).LPCVD Growth of 3C-SiC on Si Mesas and SiO2/Si Substrates for MEMS Applications.人工晶体学报,34(6),982-985.
MLA SUN Guosheng,et al."LPCVD Growth of 3C-SiC on Si Mesas and SiO2/Si Substrates for MEMS Applications".人工晶体学报 34.6(2005):982-985.
Files in This Item:
File Name/Size DocType Version Access License
4430.pdf(712KB) 限制开放--Application Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[SUN Guosheng]'s Articles
[WANG Lei]'s Articles
[GONG Quancheng]'s Articles
Baidu academic
Similar articles in Baidu academic
[SUN Guosheng]'s Articles
[WANG Lei]'s Articles
[GONG Quancheng]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[SUN Guosheng]'s Articles
[WANG Lei]'s Articles
[GONG Quancheng]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.