SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
A 10-GHz Bandwidth Electroabsorption Modulated Laser by Ultra-Low-Pressure Selective Area Growth
Zhao Qian; Pan Jiaoqing; Zhou Fan; Wang Baojun; Wang Lufeng; Wang Wei
2005
Source PublicationChinese Physics Letters
Volume22Issue:8Pages:2016-2019
AbstractA novel integration technique has been developed using band-gap energy control of InGaAsP/InGaAsP multiquantum-well (MQW) structures during simultaneous ultra-low-pressure (22 mbar) selective-area-growth (SAG) process in metal-organic chemical vapour deposition. A fundamental study of the controllability of band gap energy by the SAG method is performed. A large band-gap photoluminescence wavelength shift of 83nm is obtained with a small mask width variation (0-30μm). The method is then applied to fabricate an MQW distributed-feedback laser monolithically integrated with an electroabsorption modulator. The experimental results exhibit superior device characteristics with low threshold of 19mA, over 24 dB extinction ratio when coupled into a single mode fibre. More than 10 GHz modulation bandwidth is also achieved, which demonstrates that the ultra-low-pressure SAG technique is a promising approach for high-speed transmission photonic integrated circuits.
metadata_83national research center of optoelectronic technology, institute of semiconductors, chinese academy of sciences
Subject Area半导体材料
Funding OrganizationSpecial Funds for Major State Basic Research Project of China,Nationasl Natural Science Foundation of China
Indexed ByCSCD
Language英语
CSCD IDCSCD:2210121
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/16765
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
Zhao Qian,Pan Jiaoqing,Zhou Fan,et al. A 10-GHz Bandwidth Electroabsorption Modulated Laser by Ultra-Low-Pressure Selective Area Growth[J]. Chinese Physics Letters,2005,22(8):2016-2019.
APA Zhao Qian,Pan Jiaoqing,Zhou Fan,Wang Baojun,Wang Lufeng,&Wang Wei.(2005).A 10-GHz Bandwidth Electroabsorption Modulated Laser by Ultra-Low-Pressure Selective Area Growth.Chinese Physics Letters,22(8),2016-2019.
MLA Zhao Qian,et al."A 10-GHz Bandwidth Electroabsorption Modulated Laser by Ultra-Low-Pressure Selective Area Growth".Chinese Physics Letters 22.8(2005):2016-2019.
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