Knowledge Management System Of Institute of Semiconductors,CAS
| Low-Microwave Loss Coplanar Waveguides Fabricated on High-Resistivity Silicon Substrate | |
Yang Hua ; Zhu Hongliang; Xie Hongyun; Zhao Lingjuan; Zhou Fan; Wang Wei
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| 2006 | |
| Source Publication | 半导体学报
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| Volume | 27Issue:1Pages:1-4 |
| Abstract | Three kinds of coplanar waveguides （CPWs） are designed and fabricated on different silicon substrates---common low-resistivity silicon substrate （LRS）, LRS with a 3μm-thick silicon oxide interlayer, and high-resistivity silicon （HRS） substrate. The results show that the microwave loss of a CPW on LRS is too high to be used, but it can be greatly reduced by adding a thick interlayer of silicon oxide between the CPW transmission lines and the LRS.A CPW directly on HRS shows a loss lower than 2dB/cm in the range of 0-26GHz and the process is simple,so HRS is a more suitable CPW substrate. |
| metadata_83 | institute of semiconductors, chinese academy of sciences |
| Subject Area | 半导体材料 |
| Funding Organization | 国家重点基础研究发展规划,国家高技术研究发展计划,国家自然科学基金 |
| Indexed By | CSCD |
| Language | 英语 |
| CSCD ID | CSCD:2236068 |
| Date Available | 2010-11-23 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.semi.ac.cn/handle/172111/16755 |
| Collection | 中国科学院半导体研究所（2009年前） |
| Recommended Citation GB/T 7714 | Yang Hua,Zhu Hongliang,Xie Hongyun,et al. Low-Microwave Loss Coplanar Waveguides Fabricated on High-Resistivity Silicon Substrate[J]. 半导体学报,2006,27(1):1-4. |
| APA | Yang Hua,Zhu Hongliang,Xie Hongyun,Zhao Lingjuan,Zhou Fan,&Wang Wei.(2006).Low-Microwave Loss Coplanar Waveguides Fabricated on High-Resistivity Silicon Substrate.半导体学报,27(1),1-4. |
| MLA | Yang Hua,et al."Low-Microwave Loss Coplanar Waveguides Fabricated on High-Resistivity Silicon Substrate".半导体学报 27.1(2006):1-4. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 4334.pdf（346KB） | 限制开放 | -- | Application Full Text | |||
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