SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
Low-Microwave Loss Coplanar Waveguides Fabricated on High-Resistivity Silicon Substrate
Yang Hua; Zhu Hongliang; Xie Hongyun; Zhao Lingjuan; Zhou Fan; Wang Wei
2006
Source Publication半导体学报
Volume27Issue:1Pages:1-4
AbstractThree kinds of coplanar waveguides (CPWs) are designed and fabricated on different silicon substrates---common low-resistivity silicon substrate (LRS), LRS with a 3μm-thick silicon oxide interlayer, and high-resistivity silicon (HRS) substrate. The results show that the microwave loss of a CPW on LRS is too high to be used, but it can be greatly reduced by adding a thick interlayer of silicon oxide between the CPW transmission lines and the LRS.A CPW directly on HRS shows a loss lower than 2dB/cm in the range of 0-26GHz and the process is simple,so HRS is a more suitable CPW substrate.
metadata_83institute of semiconductors, chinese academy of sciences
Subject Area半导体材料
Funding Organization国家重点基础研究发展规划,国家高技术研究发展计划,国家自然科学基金
Indexed ByCSCD
Language英语
CSCD IDCSCD:2236068
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/16755
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
Yang Hua,Zhu Hongliang,Xie Hongyun,et al. Low-Microwave Loss Coplanar Waveguides Fabricated on High-Resistivity Silicon Substrate[J]. 半导体学报,2006,27(1):1-4.
APA Yang Hua,Zhu Hongliang,Xie Hongyun,Zhao Lingjuan,Zhou Fan,&Wang Wei.(2006).Low-Microwave Loss Coplanar Waveguides Fabricated on High-Resistivity Silicon Substrate.半导体学报,27(1),1-4.
MLA Yang Hua,et al."Low-Microwave Loss Coplanar Waveguides Fabricated on High-Resistivity Silicon Substrate".半导体学报 27.1(2006):1-4.
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