Fabrication of a Silicon-Based Microprobe for Neural Interface Applications

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	Fabrication of a Silicon-Based Microprobe for Neural Interface Applications
	Sui Xiaohong; Zhang Ruoxin; Pei Weihua; Lu Lin; Chen Hongda
	2006
Source Publication	半导体学报
Volume	27 Issue:10 Pages:1703-1706
Abstract	A two-dimensional (2D) multi-channel silicon-based microelectrode array is developed for recording neural signals. Three photolithographic masks are utilized in the fabrication process. SEM images show that the microprobe is 1. 2mm long,100μm wide,and 30μm thick, with recording sites spaced 200μm apart for good signal isolation. For the individual recording sites, the characteristics of impedance versus frequency are shown by in vitro testing. The impedance declines from 14MΩ to 1.9kv as the frequency changes from 0 to 10MHz. A compatible PCB (print circuit board) aids in the less troublesome implantation and stabilization of the microprobe.
metadata_83	institute of semiconductors, chinese academy of sciences
Subject Area	光电子学
Funding Organization	National High Technology Research,Development Program of China,National Natural Science Foundation of China
Indexed By	CSCD
Language	英语
CSCD ID	CSCD:2429665
Date Available	2010-11-23
Citation statistics
Document Type	期刊论文
Identifier	http://ir.semi.ac.cn/handle/172111/16611
Collection	中国科学院半导体研究所（2009年前）
Recommended Citation GB/T 7714	Sui Xiaohong,Zhang Ruoxin,Pei Weihua,et al. Fabrication of a Silicon-Based Microprobe for Neural Interface Applications[J]. 半导体学报,2006,27(10):1703-1706.
APA	Sui Xiaohong,Zhang Ruoxin,Pei Weihua,Lu Lin,&Chen Hongda.(2006).Fabrication of a Silicon-Based Microprobe for Neural Interface Applications.半导体学报,27(10),1703-1706.
MLA	Sui Xiaohong,et al."Fabrication of a Silicon-Based Microprobe for Neural Interface Applications".半导体学报 27.10(2006):1703-1706.

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