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Fabrication of a Silicon-Based Microprobe for Neural Interface Applications | |
Sui Xiaohong; Zhang Ruoxin; Pei Weihua![]() | |
2006 | |
Source Publication | 半导体学报
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Volume | 27Issue:10Pages:1703-1706 |
Abstract | A two-dimensional (2D) multi-channel silicon-based microelectrode array is developed for recording neural signals. Three photolithographic masks are utilized in the fabrication process. SEM images show that the microprobe is 1. 2mm long,100μm wide,and 30μm thick, with recording sites spaced 200μm apart for good signal isolation. For the individual recording sites, the characteristics of impedance versus frequency are shown by in vitro testing. The impedance declines from 14MΩ to 1.9kv as the frequency changes from 0 to 10MHz. A compatible PCB (print circuit board) aids in the less troublesome implantation and stabilization of the microprobe. |
metadata_83 | institute of semiconductors, chinese academy of sciences |
Subject Area | 光电子学 |
Funding Organization | National High Technology Research,Development Program of China,National Natural Science Foundation of China |
Indexed By | CSCD |
Language | 英语 |
CSCD ID | CSCD:2429665 |
Date Available | 2010-11-23 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.semi.ac.cn/handle/172111/16611 |
Collection | 中国科学院半导体研究所(2009年前) |
Recommended Citation GB/T 7714 | Sui Xiaohong,Zhang Ruoxin,Pei Weihua,et al. Fabrication of a Silicon-Based Microprobe for Neural Interface Applications[J]. 半导体学报,2006,27(10):1703-1706. |
APA | Sui Xiaohong,Zhang Ruoxin,Pei Weihua,Lu Lin,&Chen Hongda.(2006).Fabrication of a Silicon-Based Microprobe for Neural Interface Applications.半导体学报,27(10),1703-1706. |
MLA | Sui Xiaohong,et al."Fabrication of a Silicon-Based Microprobe for Neural Interface Applications".半导体学报 27.10(2006):1703-1706. |
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4259.pdf(1266KB) | 限制开放 | -- | Application Full Text |
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