SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
An Improvement on 2× 2 Silicon-on-Insulator Mach-Zehnder Thermo-Optical Switch
YANG Di; YU Jinzhong; CHEN Shaowu
2008
Source Publication光子学报
Volume37Issue:5Pages:931-934
AbstractAn improved 2 ×2 silicon-on-insulator Mach-Zehnder thermo-optical switch is designed and fabricated, which is based on strongly guided multimode interference couplers and single- mode phase-shifting arms. The multimode interference couplers and input/output waveguides are deeply etched to improve coupler performances and coupler-waveguide coupling efficiencies. However, shallow etching is used in the phase-shifting arms to guarantee single-mode property. The strongly guided coupler presents an attractive uniformity about 0. 03 dB and a low propagation loss of -0.6 dB. The 2× 2 switch shows an insertion loss as low as -6.8 dB, where the fiber-waveguide coupling loss of -4.3 dB is included, and the response-time is measured as short as 6.8 μs, which are much better than our previous results.
metadata_83college of science, central university for nationalities;institute of semiconductors, chinese academy of sciences
Subject Area光电子学
Funding OrganizationSupported by the Ministry of Science and Technology Plan(G2 - 3-66),"863"Plan(2 2AA312 6 ),the Science Fcundation of the Central University for Nationalities(CUN 7A)
Indexed ByCSCD
Language英语
CSCD IDCSCD:3288749
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/16069
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
YANG Di,YU Jinzhong,CHEN Shaowu. An Improvement on 2× 2 Silicon-on-Insulator Mach-Zehnder Thermo-Optical Switch[J]. 光子学报,2008,37(5):931-934.
APA YANG Di,YU Jinzhong,&CHEN Shaowu.(2008).An Improvement on 2× 2 Silicon-on-Insulator Mach-Zehnder Thermo-Optical Switch.光子学报,37(5),931-934.
MLA YANG Di,et al."An Improvement on 2× 2 Silicon-on-Insulator Mach-Zehnder Thermo-Optical Switch".光子学报 37.5(2008):931-934.
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