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An Improvement on 2× 2 Silicon-on-Insulator Mach-Zehnder Thermo-Optical Switch | |
YANG Di; YU Jinzhong; CHEN Shaowu![]() | |
2008 | |
Source Publication | 光子学报
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Volume | 37Issue:5Pages:931-934 |
Abstract | An improved 2 ×2 silicon-on-insulator Mach-Zehnder thermo-optical switch is designed and fabricated, which is based on strongly guided multimode interference couplers and single- mode phase-shifting arms. The multimode interference couplers and input/output waveguides are deeply etched to improve coupler performances and coupler-waveguide coupling efficiencies. However, shallow etching is used in the phase-shifting arms to guarantee single-mode property. The strongly guided coupler presents an attractive uniformity about 0. 03 dB and a low propagation loss of -0.6 dB. The 2× 2 switch shows an insertion loss as low as -6.8 dB, where the fiber-waveguide coupling loss of -4.3 dB is included, and the response-time is measured as short as 6.8 μs, which are much better than our previous results. |
metadata_83 | college of science, central university for nationalities;institute of semiconductors, chinese academy of sciences |
Subject Area | 光电子学 |
Funding Organization | Supported by the Ministry of Science and Technology Plan(G2 - 3-66),"863"Plan(2 2AA312 6 ),the Science Fcundation of the Central University for Nationalities(CUN 7A) |
Indexed By | CSCD |
Language | 英语 |
CSCD ID | CSCD:3288749 |
Date Available | 2010-11-23 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.semi.ac.cn/handle/172111/16069 |
Collection | 中国科学院半导体研究所(2009年前) |
Recommended Citation GB/T 7714 | YANG Di,YU Jinzhong,CHEN Shaowu. An Improvement on 2× 2 Silicon-on-Insulator Mach-Zehnder Thermo-Optical Switch[J]. 光子学报,2008,37(5):931-934. |
APA | YANG Di,YU Jinzhong,&CHEN Shaowu.(2008).An Improvement on 2× 2 Silicon-on-Insulator Mach-Zehnder Thermo-Optical Switch.光子学报,37(5),931-934. |
MLA | YANG Di,et al."An Improvement on 2× 2 Silicon-on-Insulator Mach-Zehnder Thermo-Optical Switch".光子学报 37.5(2008):931-934. |
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