SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
Laterally Electrostatically Driven Poly 3C-SiC Folded-Beam Resonant Microstructures
Wang Liang; Zhao Yongmei; Ning Jin; Sun Guosheng; Wang Lei; Liu Xingfang; Zhao Wanshun; Zeng Yiping; Li Jinmin
2008
Source Publication半导体学报
Volume29Issue:8Pages:1453-1456
AbstractMicromachined comb-drive electrostatic resonators with folded-cantilever beams were designed and fabricated. A combination of Rayleigh's method and finite-element analysis was used to calculate the resonant frequency drift as we adjusted the device geometry and material parameters. Three micromachined lateral resonant resonators with different beam widths were fabricated. Their resonant frequencies were experimentally measured to be 64.5,147.2, and 255.5kHz, respectively, which are in good agreement with the simulated resonant frequency. It is shown that an improved frequency performance could be obtained on the poly 3C-SiC based device structural material systems with high Young's modulus.
metadata_83novel semiconductor material laboratory,institute of semiconductors,chinese academy of sciences;chinese academy of sciences
Subject Area半导体材料
Funding Organization国家自然科学基金(批准号
Indexed ByCSCD
Language英语
CSCD IDCSCD:3376255
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/15977
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
Wang Liang,Zhao Yongmei,Ning Jin,et al. Laterally Electrostatically Driven Poly 3C-SiC Folded-Beam Resonant Microstructures[J]. 半导体学报,2008,29(8):1453-1456.
APA Wang Liang.,Zhao Yongmei.,Ning Jin.,Sun Guosheng.,Wang Lei.,...&Li Jinmin.(2008).Laterally Electrostatically Driven Poly 3C-SiC Folded-Beam Resonant Microstructures.半导体学报,29(8),1453-1456.
MLA Wang Liang,et al."Laterally Electrostatically Driven Poly 3C-SiC Folded-Beam Resonant Microstructures".半导体学报 29.8(2008):1453-1456.
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