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SEMI OpenIR  > 中国科学院半导体研究所(2009年前)  > 期刊论文

题名: Laterally Electrostatically Driven Poly 3C-SiC Folded-Beam Resonant Microstructures
作者: Wang Liang;  Zhao Yongmei;  Ning Jin;  Sun Guosheng;  Wang Lei;  Liu Xingfang;  Zhao Wanshun;  Zeng Yiping;  Li Jinmin
发表日期: 2008
摘要: Micromachined comb-drive electrostatic resonators with folded-cantilever beams were designed and fabricated. A combination of Rayleigh's method and finite-element analysis was used to calculate the resonant frequency drift as we adjusted the device geometry and material parameters. Three micromachined lateral resonant resonators with different beam widths were fabricated. Their resonant frequencies were experimentally measured to be 64.5,147.2, and 255.5kHz, respectively, which are in good agreement with the simulated resonant frequency. It is shown that an improved frequency performance could be obtained on the poly 3C-SiC based device structural material systems with high Young's modulus.
刊名: 半导体学报
专题: 中国科学院半导体研究所(2009年前)_期刊论文

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推荐引用方式:
Wang Liang;Zhao Yongmei;Ning Jin;Sun Guosheng;Wang Lei;Liu Xingfang;Zhao Wanshun;Zeng Yiping;Li Jinmin.Laterally Electrostatically Driven Poly 3C-SiC Folded-Beam Resonant Microstructures,半导体学报,2008,29(8):1453-1456
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