SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
Wet etching and infrared absorption of AlN bulk single crystals
Li Weiwei; Zhao Youwen; Dong Zhiyuan; Yang Jun; Hu Weijie; Ke Jianhong
2009
Source Publication半导体学报
Volume30Issue:7Pages:27-30
AbstractThe defects and the lattice perfection of an AlN (0001) single crystal grown by the physical vapor transport (PVT) method were investigated by wet etching, X-ray diffraction (XRD), and infrared absorption, respectively. A regular hexagonal etch pit density (EPD) of about 4000 cm~(-2) is observed on the (0001) A1 surface of an AlN single crystal. The EPD exhibits a line array along the slip direction of the wurtzite structure, indicating a quite large thermal stress born by the crystal in the growth process. The XRD full width at half maximum (FWHM) of the single crystal is 35 arcsec, suggesting a good lattice perfection. Pronounced infrared absorption peaks are observed at wave numbers of 1790, 1850, 2000, and 3000 cm~(-1), respectively. These absorptions might relate to impurities O, C, Si and their complexes in AlN single crystals.
metadata_83institute of semiconductors, chinese academy of sciences
Subject Area半导体材料
Indexed ByCSCD
Language英语
CSCD IDCSCD:3651658
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/15739
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
Li Weiwei,Zhao Youwen,Dong Zhiyuan,et al. Wet etching and infrared absorption of AlN bulk single crystals[J]. 半导体学报,2009,30(7):27-30.
APA Li Weiwei,Zhao Youwen,Dong Zhiyuan,Yang Jun,Hu Weijie,&Ke Jianhong.(2009).Wet etching and infrared absorption of AlN bulk single crystals.半导体学报,30(7),27-30.
MLA Li Weiwei,et al."Wet etching and infrared absorption of AlN bulk single crystals".半导体学报 30.7(2009):27-30.
Files in This Item:
File Name/Size DocType Version Access License
3679.pdf(499KB) 限制开放--Application Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Li Weiwei]'s Articles
[Zhao Youwen]'s Articles
[Dong Zhiyuan]'s Articles
Baidu academic
Similar articles in Baidu academic
[Li Weiwei]'s Articles
[Zhao Youwen]'s Articles
[Dong Zhiyuan]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Li Weiwei]'s Articles
[Zhao Youwen]'s Articles
[Dong Zhiyuan]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.