SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
Luminescence spectroscopy of ion implanted AlN bulk single crystal
Li Weiwei; Zhao Youwen; Dong Zhiyuan; Yang Jun; Hu Weijie; Ke Jianhong; Huang Yan; Gao Zhenhua
2009
Source Publication半导体学报
Volume30Issue:8Pages:31-33
AbstractHigh concentrations of Si and Zn were implanted into (0001) AlN bulk crystal grown by the self-seeded physical vapor transport (PVT) method. Cathode luminescence (CL) and photoluminescence (PL) spectroscopy were used to investigate the defects and properties of the implanted AlN. PL spectra of the implanted AlN are dominated by a broad near-band luminescence peak between 200 and 254 nm. After high temperature annealing, implantation induced lattice damages are recovered and the PL intensity increases significantly, suggesting that the implanted impurity Si and Zn occupy lattice site of Al. CL results imply that a 457 nm peak is Al vacancy related. Resistance of the AlN samples is still very high after annealing, indicating a low electrical activation efficiency of the impurity in AlN single crystal.
metadata_83institute of semiconductors,chinese academy of sciences;institute of high energy physics,chinese academy of sciences
Subject Area半导体材料
Indexed ByCSCD
Language英语
CSCD IDCSCD:3657105
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/15731
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
Li Weiwei,Zhao Youwen,Dong Zhiyuan,et al. Luminescence spectroscopy of ion implanted AlN bulk single crystal[J]. 半导体学报,2009,30(8):31-33.
APA Li Weiwei.,Zhao Youwen.,Dong Zhiyuan.,Yang Jun.,Hu Weijie.,...&Gao Zhenhua.(2009).Luminescence spectroscopy of ion implanted AlN bulk single crystal.半导体学报,30(8),31-33.
MLA Li Weiwei,et al."Luminescence spectroscopy of ion implanted AlN bulk single crystal".半导体学报 30.8(2009):31-33.
Files in This Item:
File Name/Size DocType Version Access License
3674.pdf(245KB) 限制开放--Application Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Li Weiwei]'s Articles
[Zhao Youwen]'s Articles
[Dong Zhiyuan]'s Articles
Baidu academic
Similar articles in Baidu academic
[Li Weiwei]'s Articles
[Zhao Youwen]'s Articles
[Dong Zhiyuan]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Li Weiwei]'s Articles
[Zhao Youwen]'s Articles
[Dong Zhiyuan]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.