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题名: Influence of zinc phthalocyanines on photoelectrical properties of hydrogenated amorphous silicon
作者: Zhang Changsha;  Zeng Xiangbo;  Peng Wenbo;  Shi Mingji;  Liu Shiyong;  Xiao Haibo;  Wang Zhanguo;  Chen Jun;  Wang Shuangqing
发表日期: 2009
摘要: Composites consisting of hydrogenated amorphous silicon (a-Si: H, inorganic) and zinc phthalocyanine (ZnPc, organic) were prepared by vacuum evaporation of ZnPc and sequential deposition amorphous silicon via plasma enhanced chemical vapor deposition (PECVD). The optical and electrical properties of the composite film have been investigated. The results demonstrate that ZnPc can endure the temperature and bombardment of the PECVD plasma and photoconductivity of the composite film was improved by 89.9% compared to pure a-Si: H film. Electron mobility-lifetime products μτ of the composite film were increased by nearly one order of magnitude from 6.96 × 10~(-7) to 5.08 × 10~(-6) cm~2/V. Combined with photoconductivity spectra of the composites and pure a-Si: H, we tentatively elucidate the improvement in photoconductivity of the composite film.
刊名: 半导体学报
专题: 中国科学院半导体研究所(2009年前)_期刊论文

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Zhang Changsha;Zeng Xiangbo;Peng Wenbo;Shi Mingji;Liu Shiyong;Xiao Haibo;Wang Zhanguo;Chen Jun;Wang Shuangqing.Influence of zinc phthalocyanines on photoelectrical properties of hydrogenated amorphous silicon,半导体学报,2009,30(8):39-42
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