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| Influence of zinc phthalocyanines on photoelectrical properties of hydrogenated amorphous silicon | |
Zhang Changsha; Zeng Xiangbo; Peng Wenbo ; Shi Mingji; Liu Shiyong; Xiao Haibo; Wang Zhanguo; Chen Jun; Wang Shuangqing
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| 2009 | |
| Source Publication | 半导体学报
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| Volume | 30Issue:8Pages:39-42 |
| Abstract | Composites consisting of hydrogenated amorphous silicon (a-Si: H, inorganic) and zinc phthalocyanine (ZnPc, organic) were prepared by vacuum evaporation of ZnPc and sequential deposition amorphous silicon via plasma enhanced chemical vapor deposition (PECVD). The optical and electrical properties of the composite film have been investigated. The results demonstrate that ZnPc can endure the temperature and bombardment of the PECVD plasma and photoconductivity of the composite film was improved by 89.9% compared to pure a-Si: H film. Electron mobility-lifetime products μτ of the composite film were increased by nearly one order of magnitude from 6.96 × 10~(-7) to 5.08 × 10~(-6) cm~2/V. Combined with photoconductivity spectra of the composites and pure a-Si: H, we tentatively elucidate the improvement in photoconductivity of the composite film. |
| metadata_83 | institute of semiconductors,chinese academy of sciences;institute of chemistry,chinese academy of sciences |
| Subject Area | 半导体材料 |
| Funding Organization | the State Key Development Program for Basic Research of China,the National Natural Science Foundation of China,the National High Technology Research and Development Program of China |
| Indexed By | CSCD |
| Language | 英语 |
| CSCD ID | CSCD:3657107 |
| Date Available | 2010-11-23 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.semi.ac.cn/handle/172111/15727 |
| Collection | 中国科学院半导体研究所（2009年前） |
| Recommended Citation GB/T 7714 | Zhang Changsha,Zeng Xiangbo,Peng Wenbo,et al. Influence of zinc phthalocyanines on photoelectrical properties of hydrogenated amorphous silicon[J]. 半导体学报,2009,30(8):39-42. |
| APA | Zhang Changsha.,Zeng Xiangbo.,Peng Wenbo.,Shi Mingji.,Liu Shiyong.,...&Wang Shuangqing.(2009).Influence of zinc phthalocyanines on photoelectrical properties of hydrogenated amorphous silicon.半导体学报,30(8),39-42. |
| MLA | Zhang Changsha,et al."Influence of zinc phthalocyanines on photoelectrical properties of hydrogenated amorphous silicon".半导体学报 30.8(2009):39-42. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 3672.pdf（268KB） | 限制开放 | -- | Application Full Text | |||
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