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题名: Measurement of trace phosphorus in dichlorosilane by high-temperature hydrogen reduction gas chromatography
作者: Wen RM;  Liang JW;  Zhou SJ;  Zhau ZH
发表日期: 1997
摘要: Dichlorosilane, a gas at normal temperature with a boiling point of 8.3 degrees C, is very difficult to sample and detect using conventional methods. We reduced phosphorus in dichlorosilane to PH3 by hydrogen at high temperature, then PH3 was separated from chlorosilanes by NaOH solution and from other hydrides by chromatographic absorption. Thus the problem of interference of chlorosilanes and other hydrides was overcome and PH, was measured by a double flame photometric detector at 526 nm. This method was sensitive, reliable and convenient and the sensitivity reached as low as 0.04 mu g/l.
KOS主题词: HYDROGEN REDUCTION;  Phosphorus;  Bore
刊名: JOURNAL OF CHROMATOGRAPHY A
专题: 中国科学院半导体研究所(2009年前)_期刊论文

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推荐引用方式:
Wen RM; Liang JW; Zhou SJ; Zhau ZH .Measurement of trace phosphorus in dichlorosilane by high-temperature hydrogen reduction gas chromatography ,JOURNAL OF CHROMATOGRAPHY A,1997,757(0):319-323
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