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题名: Rapid thermal annealing of arsenic implanted Si1-xGex epilayers
作者: Zou LF;  Wang ZG;  Sun DZ;  Fan TW;  Liu XF;  Zhang JW
发表日期: 1997
摘要: Rapid thermal annealing of arsenic implanted Si1-xGex was studied by secondary ion-mass spectroscopy (SIMS) and spreading resistance probe (SRP) over a wide range of Ge fractions (0-43%). Redistribution of the implanted arsenic was followed as a function of Ge content and annealing temperature. Arsenic concentration profiles from SIMS indicated that the behavior of implanted arsenic in Si1-xGex after RTA was different from that in Si, and the Si1-xGex samples exhibited box-shaped, concentration-dependent diffusion profiles with increasing Ge content. The maximum concentrations of electrically active arsenic in Si1-xGex was found to decrease with increasing Ge content. Experimental results showed that the arsenic diffusion is enhanced with increasing temperature for certain Ge content and strongly dependent on Ge content, and the higher Ge content, the faster As diffusion.
KOS主题词: Diffusion;  Silicon;  Metric system;  Silicon;  amorphisation;  Temperature
刊名: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
专题: 中国科学院半导体研究所(2009年前)_期刊论文

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推荐引用方式:
Zou LF; Wang ZG; Sun DZ; Fan TW; Liu XF; Zhang JW .Rapid thermal annealing of arsenic implanted Si1-xGex epilayers ,NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS ,1997,122(4):639-642
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