Dielectric properties of Bi2Ti2O7 films grown on Si(100) substrate by APMOCVD

SEMI OpenIR > 中国科学院半导体研究所（2009年前）

	Dielectric properties of Bi2Ti2O7 films grown on Si(100) substrate by APMOCVD
	Wang H; Shang SX; Yao WF; Hou Y; Xu XH; Wang D; Wang M; Yu JZ; Wang H Shandong Univ State Key Lab Crystal Mat Jinan 250100 Peoples R China.
	2002
会议名称	10th International Meeting on Ferroelectricity (IMF-10)
会议录名称	FERROELECTRICS, 271
页码	1707-1713
会议日期	SEP 03-07, 2001
会议地点	MADRID, SPAIN
出版地	4 PARK SQUARE, MILTON PARK, ABINGDON OX14 4RN, OXON, ENGLAND
出版者	TAYLOR & FRANCIS LTD
ISSN	0015-0193
部门归属	shandong univ, state key lab crystal mat, jinan 250100, peoples r china; shandong univ, dept environm engn, jinan 250100, peoples r china; chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china
摘要	The growth of Bi2Ti2O7 films with (111) orientation on Si(100) substrate by atmospheric pressure metal-organic chemical vapor deposition(APMOCVD) technique at 480similar to550 degreesC is presented. The films were characterized by X-ray diffraction analysis, atomic force microscopy and electron diffraction. The results show high quality Bi2Ti2O7 films with smooth shinning surface. The dielectric properties and C-V characterization of the films were studied. The dielectric constant (epsilon) and loss tangent (tgdelta) were found to be 180 and 0.01 respectively. The charge storage density was 31.9fC/mum(2). The resistivity is higher than 1x10(12) Omega. .cm under the applied voltage of 5V. The Bi2Ti2O7 films are suitable to be used as a new insulating gate material in dynamic random access memory (DRAM).
关键词	Bi2ti2o7 Thin Film Mocvd (111) Orientation Chemical-vapor-deposition Crystal Thin-films
学科领域	光电子学
收录类别	CPCI-S
语种	英语
文献类型	会议论文
条目标识符	http://ir.semi.ac.cn/handle/172111/14891
专题	中国科学院半导体研究所（2009年前）
通讯作者	Wang H Shandong Univ State Key Lab Crystal Mat Jinan 250100 Peoples R China.
推荐引用方式 GB/T 7714	Wang H,Shang SX,Yao WF,et al. Dielectric properties of Bi2Ti2O7 films grown on Si(100) substrate by APMOCVD[C]. 4 PARK SQUARE, MILTON PARK, ABINGDON OX14 4RN, OXON, ENGLAND:TAYLOR & FRANCIS LTD,2002:1707-1713.

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