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题名: Wafer-Level Testable High-Speed Silicon Microring Modulator Integrated with Grating Couplers
作者: Xiao X (Xiao Xi);  Zhu Y (Zhu Yu);  Xu HH (Xu Hai-Hua);  Zhou LA (Zhou Liang);  Hu YT (Hu Ying-Tao);  Li ZY (Li Zhi-Yong);  Li YT (Li Yun-Tao);  Yu YD (Yu Yu-De);  Yu JZ (Yu Jin-Zhong)
发表日期: 2010
摘要: A wafer-level testable silicon-on-insulator-based microring modulator is demonstrated with high modulation speed, to which the grating couplers are integrated as the fiber-to-chip interfaces. Cost-efficient fabrications are realized with the help of optical structure and etching depth designs. Grating couplers and waveguides are patterned and etched together with the same slab thickness. Finally we obtain a 3-dB coupling bandwidth of about 60nm and 10 Gb/s nonreturn-to-zero modulation by wafer-level optical and electrical measurements.
KOS主题词: Wave guides;  Photonics
刊名: CHINESE PHYSICS LETTERS
专题: 集成光电子学国家重点实验室_期刊论文

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推荐引用方式:
Xiao X (Xiao Xi), Zhu Y (Zhu Yu), Xu HH (Xu Hai-Hua), Zhou LA (Zhou Liang), Hu YT (Hu Ying-Tao), Li ZY (Li Zhi-Yong), Li YT (Li Yun-Tao), Yu YD (Yu Yu-De), Yu JZ (Yu Jin-Zhong).Wafer-Level Testable High-Speed Silicon Microring Modulator Integrated with Grating Couplers.CHINESE PHYSICS LETTERS,2010,27(9):Art. No. 094207
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