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SEMI OpenIR  > 中国科学院半导体研究所(2009年前)  > 期刊论文

题名: Si1-xGex/Si resonant-cavity-enhanced photodetectors with a silicon-on-oxide reflector operating near 1.3 mu m
作者: Li C;  Yang QQ;  Wang HJ;  Zhu J;  Luo LP;  Yu JZ;  Wang QM;  Li YK;  Zhou JM;  Lin CL
发表日期: 2000
摘要: We report on a Si1-xGex/Si multiple quantum-well resonant-cavity-enhanced (RCE) photodetector with a silicon-on-oxide reflector as the bottom mirror operating near 1.3 mu m. The breakdown voltage of the photodetector is above 18 V and the dark current density at 5 V reverse bias is 12 pA/mu m(2). The RCE photodetector shows enhanced responsivity with a clear peak at 1.285 mu m and the peak responsivity is measured around 10.2 mA/W at a reverse bias of 5 V. The external quantum efficiency at 1.3 mu m is measured to be 3.5% under reverse bias of 16 V, which is enhanced three- to fourfold compared with that of a conventional p-i-n photodetector with a Ge content of 0.5 reported in 1995 by Huang [Appl. Phys. Lett. 67, 566 (1995)]. (C) 2000 American Institute of Physics. [S0003-6951(00)00628-8].
KOS主题词: High-speed aeronautics
刊名: APPLIED PHYSICS LETTERS
专题: 中国科学院半导体研究所(2009年前)_期刊论文

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推荐引用方式:
Li C; Yang QQ; Wang HJ; Zhu J; Luo LP; Yu JZ; Wang QM; Li YK; Zhou JM; Lin CL .Si1-xGex/Si resonant-cavity-enhanced photodetectors with a silicon-on-oxide reflector operating near 1.3 mu m ,APPLIED PHYSICS LETTERS,2000,77(2):157-159
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