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题名: Metalorganic chemical vapor deposition of GaNAs alloys using different Ga precursors
作者: Wei X;  Wang GH;  Zhang GZ;  Zhu XP;  Ma XY;  Chen LH
发表日期: 2002
摘要: The GaNAs alloys have been grown by metalorganic chemical vapor deposition (MOCVD) using dimethylhydrazine (DMHv) as the nitrogen precursor, triethylgallium (TEGa) and trimethylgallium (TMGa) as the gallium precursors, respectively. Both symmetric (004) and asymmetric (1 1 5) high-resolution X-ray diffraction (HRXRD) were used to determine the nitrogen content in GaNAs layers. Secondary ion mass spectrometry (SIMS) was used to obtain the impurity content. T e influence of different Ga precursors on GaNAs quality has been investigated. Phase separation is observed in the < 1 1 5 > direction when using TMGa as the Ga precursor but not observed when using TEGa. This phenomenon should originate from the parasitic reaction between the Ga and N precursors. Furthermore. samples grown with TEGa have better quality and less impurity contamination than those with TMGa. Nitrogen content of 5.742% has been achieved using TEGa and no phase separation observed in the sample. (C) 2002 Elsevier Science B.V. All rights reserved.
KOS主题词: precursor;  Gallium compounds;  Semiconductor lasers;  Solar cells;  solar generators;  Energy bands;  Development;  Pyrolysis;  Epitaxy
刊名: JOURNAL OF CRYSTAL GROWTH
专题: 中国科学院半导体研究所(2009年前)_期刊论文

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推荐引用方式:
Wei X; Wang GH; Zhang GZ; Zhu XP; Ma XY; Chen LH .Metalorganic chemical vapor deposition of GaNAs alloys using different Ga precursors ,JOURNAL OF CRYSTAL GROWTH,2002,236 (4):516-522
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