高级检索   注册
SEMI OpenIR  > 中国科学院半导体研究所(2009年前)  > 期刊论文

题名: Monte Carlo simulation of the modulated effect induced by the dislocation to the quantum dot growth
作者: Zhao C (Zhao C.);  Chen YH (Chen Y. H.);  Zhao M (Zhao Man);  Zhang CL (Zhang C. L.);  Xu B (Xu B.);  Yu LK (Yu L. K.);  Sun J (Sun J.);  Lei W (Lei W.);  Wang ZG (Wang Z. G.)
发表日期: 2006
摘要: Performing an event-based continuous kinetic Monte Carlo simulation, we investigate the modulated effect induced by the dislocation on the substrate to the growth of semiconductor quantum dots (QDs). The relative positions between the QDs and the dislocations are studied. The stress effects to the growth of the QDs are considered in simulation. The simulation results are compared with the experiment and the agreement between them indicates that this simulation is useful to study the growth mode and the atomic kinetics during the growth of the semiconductor QDs. (c) 2006 Elsevier Ltd. All rights reserved.
KOS主题词: Monte Carlo method;  atomic layer deposition;  Quantum dot;  Layer
刊名: MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
专题: 中国科学院半导体研究所(2009年前)_期刊论文

条目包含的文件

文件 大小格式
3222.pdf330KbAdobe PDF 联系获取全文


许可声明:条目相关作品遵循知识共享协议(Creative Commons)。


推荐引用方式:
Zhao C (Zhao C.); Chen YH (Chen Y. H.); Zhao M (Zhao Man); Zhang CL (Zhang C. L.); Xu B (Xu B.); Yu LK (Yu L. K.); Sun J (Sun J.); Lei W (Lei W.); Wang ZG (Wang Z. G.) .Monte Carlo simulation of the modulated effect induced by the dislocation to the quantum dot growth ,MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING,2006,9(1-3):31-35
个性服务
 推荐该条目
 保存到收藏夹
 查看访问统计
 Endnote导出
Google Scholar
 Google Scholar中相似的文章
 [Zhao C (Zhao C.)]的文章
 [Chen YH (Chen Y. H.)]的文章
 [Zhao M (Zhao Man)]的文章
CSDL跨库检索
 CSDL跨库检索中相似的文章
 [Zhao C (Zhao C.)]的文章
 [Chen YH (Chen Y. H.)]的文章
 [Zhao M (Zhao Man)]的文章
Scirus search
 Scirus中相似的文章
Social Bookmarking
  Add to CiteULike  Add to Connotea  Add to Del.icio.us  Add to Digg  Add to Reddit 
所有评论 (0)
暂无评论

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。

 

 

Valid XHTML 1.0! 版权所有 © 2007-2012  中国科学院半导体研究所  -反馈
系统开发与技术支持:中国科学院国家科学图书馆兰州分馆(信息系统部)
本系统基于 MIT 和 Hewlett-Packard 的 DSpace 软件开发