高级检索   注册
SEMI OpenIR  > 中国科学院半导体研究所(2009年前)  > 期刊论文

题名: Evolution of mosaic structure in InN grown by metalorganic chemical vapor deposition
作者: Huang Y (Huang Y.);  Wang H (Wang H.);  Sun Q (Sun Q.);  Chen J (Chen J.);  Li DY (Li D. Y.);  Zhang JC (Zhang J. C.);  Wang JF (Wang J. F.);  Wang YT (Wang Y. T.);  Yang H (Yang H.)
发表日期: 2006
摘要: Mosaic structure in InN layers grown by metalorganic chemical vapor deposition at various temperatures has been investigated by X-ray diffraction (XRD). With a combination of Williamson-Hall measurement and fitting of twist angles, it was found that variation of growth temperature from 450 to 550 degrees C leads to the variation of the lateral coherence length, vertical coherence length, tilt and twist of mosaic blocks in InN films in a, respectively, monotonic way. In particular, mosaic tilt increases whereas mosaic twist decreases with elevating temperature. Atomic force microscopy shows the morphological difference of the InN nucleation layers grown at 450 and 550 degrees C. Different coalescence thickness and temperature-dependent in-plane rotation of InN nuclei are considered to account for the XRD results. (c) 2006 Elsevier B.V. All rights reserved.
KOS主题词: X-ray crystallography;  Metal organic chemical vapor deposition;  X-ray crystallography;  Threading dislocations;  Charge exchange;  Thin films;  Aluminum oxide
刊名: JOURNAL OF CRYSTAL GROWTH
专题: 中国科学院半导体研究所(2009年前)_期刊论文

条目包含的文件

文件 大小格式
3182.pdf246KbAdobe PDF 联系获取全文


许可声明:条目相关作品遵循知识共享协议(Creative Commons)。


推荐引用方式:
Huang Y (Huang Y.); Wang H (Wang H.); Sun Q (Sun Q.); Chen J (Chen J.); Li DY (Li D. Y.); Zhang JC (Zhang J. C.); Wang JF (Wang J. F.); Wang YT (Wang Y. T.); Yang H (Yang H.) .Evolution of mosaic structure in InN grown by metalorganic chemical vapor deposition ,JOURNAL OF CRYSTAL GROWTH,2006 ,293(2):269-272
个性服务
 推荐该条目
 保存到收藏夹
 查看访问统计
 Endnote导出
Google Scholar
 Google Scholar中相似的文章
 [Huang Y (Huang Y.)]的文章
 [Wang H (Wang H.)]的文章
 [Sun Q (Sun Q.)]的文章
CSDL跨库检索
 CSDL跨库检索中相似的文章
 [Huang Y (Huang Y.)]的文章
 [Wang H (Wang H.)]的文章
 [Sun Q (Sun Q.)]的文章
Scirus search
 Scirus中相似的文章
Social Bookmarking
  Add to CiteULike  Add to Connotea  Add to Del.icio.us  Add to Digg  Add to Reddit 
所有评论 (0)
暂无评论

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。

 

 

Valid XHTML 1.0! 版权所有 © 2007-2012  中国科学院半导体研究所  -反馈
系统开发与技术支持:中国科学院国家科学图书馆兰州分馆(信息系统部)
本系统基于 MIT 和 Hewlett-Packard 的 DSpace 软件开发