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Comparative study of the surface passivation on crystalline silicon by silicon thin films with different structures
Zhao L; Diao HW; Zeng XB; Zhou CL; Li HL; Wang WJ; Zhao, L, Chinese Acad Sci, Inst Elect Engn, Solar Cell Technol Grp, Key Lab Solar Thermal Energy & Photovolta Syst, Beijing 100190, Peoples R China. E-mail Address: zhaolei@mail.iee.ac.cn
2010
Source PublicationPHYSICA B-CONDENSED MATTER
Volume405Issue:1Pages:61-64
AbstractSi thin films with different structures were deposited by plasma enhanced chemical vapor deposition (PECVD), and characterized via Raman spectroscopy and Fourier transform infrared (FTIR) spectroscopy. The passivation effect of such different Si thin films on crystalline Si surface was investigated by minority carrier lifetime measurement via a method, called microwave photoconductive decay (mu PCD), for the application in HIT (heterojunction with intrinsic thin-layer) solar cells. The results show that amorphous silicon (a-Si:H) has a better passivation effect due to its relative higher H content, compared with microcrystalline (mu c-Si) silicon and nanocrystalline silicon (nc-Si). Further, it was found that H atoms in the form of Si-H bonds are more preferred than those in the form of Si-H-2 bonds to passivate the crystalline Si surface. (C) 2009 Elsevier B.V. All rights reserved.
metadata_24国内
KeywordSilicon Thin Film Hit Solar Cell Surface Passivation Heterojunction Solar-cells Hot-wire Cvd Ydrogen Dilution N-type Spectroscopy Optimization
Subject Area半导体材料
Funding Organization863 High Technology Research Program of China 2006AA05Z405; IEE, CAS
Indexed BySCI
Language英语
Date Available2010-04-04
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/10198
Collection表面物理国家重点实验室
Corresponding AuthorZhao, L, Chinese Acad Sci, Inst Elect Engn, Solar Cell Technol Grp, Key Lab Solar Thermal Energy & Photovolta Syst, Beijing 100190, Peoples R China. E-mail Address: zhaolei@mail.iee.ac.cn
Recommended Citation
GB/T 7714
Zhao L,Diao HW,Zeng XB,et al. Comparative study of the surface passivation on crystalline silicon by silicon thin films with different structures[J]. PHYSICA B-CONDENSED MATTER,2010,405(1):61-64.
APA Zhao L.,Diao HW.,Zeng XB.,Zhou CL.,Li HL.,...&Zhao, L, Chinese Acad Sci, Inst Elect Engn, Solar Cell Technol Grp, Key Lab Solar Thermal Energy & Photovolta Syst, Beijing 100190, Peoples R China. E-mail Address: zhaolei@mail.iee.ac.cn.(2010).Comparative study of the surface passivation on crystalline silicon by silicon thin films with different structures.PHYSICA B-CONDENSED MATTER,405(1),61-64.
MLA Zhao L,et al."Comparative study of the surface passivation on crystalline silicon by silicon thin films with different structures".PHYSICA B-CONDENSED MATTER 405.1(2010):61-64.
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