Knowledge Management System Of Institute of Semiconductors,CAS
Your requested [用于金属有机化合物化学气相沉积设备反应室的进气顶盘] is currently limited to Institute of Semiconductors,Chinese Academy of Sciences internal sharing.
To solicit author authorization, you need to provide the following information: name, organization, personal e-mail, reason for request. The information you provide will be reviewed and you are committed to the truth of the information provided. The personal information you provide will be protected according to law.